DLC is
Supplier of
lithographic products including ultra-pure negative / positive
photoresist and planarizing coating for the microelectronic,
optoelectronic and graphic arts industries and other
customer-specific specialty coatings
DLC provide a negative acting
resist that is soluble in acetone and has
an easy to use water
soluble developer. It's really a negative acting
positive resist. It is
very easy to use.
光阻有幾個重要的技術參數:
解析度(resolution)區別晶圓片表面相鄰圖形特徵的能力,一般用關鍵尺寸(CD,Critical
Dimension)來衡量解析度。 對比度(Contrast):指光阻從曝光區到非曝光區過渡的陡度。
敏感度(Sensitivity):光阻上產生一個良好的圖形所需一定波長光的最小能量值(或最小曝光量)。 粘滯性/黏度(Viscosity):是衡量光阻流動特性的參數。
粘附性(Adherence):表徵光阻粘著於襯底的強度。 抗蝕性(Anti-etching):光阻必須保持它的粘附性,在後續的刻蝕工序中保護襯底表面。
表面張力(Surface
tension):液體中將表面分子拉向液體主體內的分子間吸引力。
存儲和傳送(storage
and transmission):能量(光和熱)可以啟動光阻。應該存儲在密閉、低溫、不透光的盒中。同時必須規定光阻的閒置期限和存儲溫度環境。
旋寶好化學主營產品包括
IC photoresist , Packaging , LCP/TP
phototresist , LED photoresist , Discrete Device , MEMS
正負型光阻質量皆通過 黏度檢測
>
水含量檢測
>
固含量檢測
>
UV吸收光譜儀
>
開黃光流程
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