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抑制電滲透流 |
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披覆保護層 |
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壓印光子晶體結構 |
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介電層凹陷孔洞填補 |
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乾蝕刻圖案光罩 |
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絕緣層上覆矽 |
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低光耗損耐高溫 |
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微機電封裝 |
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次微米製程填隙 |
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退火時間與溫度 |
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Interdigitated back
passivated contact (IBPC) solar cell |
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Ga2O3 MOSFETs |
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Overcoat Layer for SiO2 Ridge
Waveguides |
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Intermediate layer wafer
bonding |
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Inductively coupled plasma
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CF4 plasma
etching |
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BHF
二氧化矽蝕刻液 |
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