|
旋塗式玻璃SOG
(Spin-on glass)是液態SiO2，晶片旋塗SOG後可增加平坦性。為將SOG轉換成固態SiO2層，必須將晶片置於400~450℃的爐管，蒸除SOG內的溶劑
旋塗式玻璃
(spin-on glass; SOG)
是形成薄膜也是平坦化一種方式，將溶於溶劑中的介電物質旋轉塗佈在需要平坦化的晶片上，使介電物質隨著溶劑填入溝渠中，再經過高溫固化，形成近似二氧化矽的物質在晶片上，讓表面輪廓比較平滑達到局部平坦化的目的，使後續的製程得以順利進行。
|
Spin-On Glass
For Interlevel Dielectric and Protective Coating Applications |
|
Thickness Range |
0.2 - 1.0
µm |
|
Performance |
Low dielectric
constant.
Low tensile stress.
Excellent adhesion to substrates.
Superior shelf life during storage at room temperature.
State-of-the-art
planarization; controlled film thickness
Excellent gap fill; very low defect density
Choice of carrier solvent systems |
|
Applications |
Dielectric
smoothing layer for multilevel interconnects.
Protective coating. |
Deposition & Planarization
Spin-on-glass bake and cure using a resistively heated
batch annealing oven
Low
temperature GaAs/Si
direct wafer bonding
NanoPhosphors for
white LEDs
If you don't find what you're looking for,
Contact Us.
We may have a suitable product that's not listed, or we may be
able to develop a material to fit your specific needs.
Tel : (02)2217-3442 / Fax : (02)2704-4070
|
