Spin-On Glass
For Interlevel Dielectric and Protective Coating Applications
Thickness Range
0.2 - 1.0
µm
Performance
Low dielectric
constant.
Low tensile stress.
Excellent adhesion to substrates.
Superior shelf life during storage at room temperature. State-of-the-art
planarization; controlled film thickness
Excellent gap fill; very low defect density
Choice of carrier solvent systems
Refractive index
From 1.25 up to 1.85.
Applications
Dielectric
smoothing layer for multilevel interconnects.
Protective coating. Planarization Trench Fill, Smoothing &
Hard masks High and low refractive index materials
If you don't find what you're looking for,
Contact Us.
We may have a suitable product that's not listed, or we may be
able to develop a material to fit your specific needs.
Tel : (02)2217-3442 / Fax : (02)2704-4070
