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表面塗佈 晶圓洗滌/乾燥 分子沉積系統
Sol Gel 含浸塗佈 超音波串連洗淨 微影壓印
噴塗 光阻顯影 奈米測量系統
淋幕 化學氣相沈積 掃描式探針顯微鏡
旋塗  電 路板自動塗佈  粒徑分析
稠密度控制 文字標示噴墨列印 其他
黏度控制 耐蝕刻油墨列印 大面積光固化系統
稠密度/黏度管理 4軸自動塗覆  气体回收设备
程式化控制  微機電製程 恆溫槽
狹縫模具式塗佈 3D聚合物沉積 OLED 蒸鍍
物理氣相沈積  矽等向氣相蝕刻 大面積黏塵地
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