製品介紹 氣相沉積系統

Edwards Vacuum Pump
  Trident Manifold
  Complete Trident Manifold Assembly
  Single Port Manifold
  Complete Single Port Manifold Assembly
  P-100 Chiller
  Pump Or Vaporizer Valve
  Vacuum Valve Body Seal Kit
  Vacuum Valve Stem Seal Kit
  Bridge Amplifier With cable
  Gage Tube
  O-Ring, Load Door
  O-Ring, Viewport
  O-Ring, Chamber Lid,
  O-Ring, Cold Trap Flange Cover,
  Gasket, Cold Trap Bottom
  Heater, Load Door
  Heater, Vaporizer Block
  Heater, Vaporizer Band
  Quartz Liner
  T’Couple, K-Cal,


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Portable Vacuum Deposition Systems

Precision Gas Phase Polymer Deposition :
Specialty Coating Systems offers three Parylene deposition system models ranging from a portable unit for laboratory and process development use to large production models for higher volume manufacturing applications.

System Operation :
SCS Parylene deposition systems are designed for accurate and repeatable operation by non-skilled workers. The entire coating process is automatically controlled via a
programmable logic controller. The coating system operator is tasked with loading
substrates into the coating chamber, loading the dimer into the vaporizer and depressing the process start button. The deposition system alerts the operator when the process is completed.

Each deposition system features an operator’s control panel that displays critical, factory pre-programmed process parameters. Process settings are accessible and can be changed by qualified personnel when necessary. All three models feature closed-loop monomer pressure control. This feature ensures deposition of the polymer film at a precise rate.

Operating temperatures and pressures are factory set and continuously monitored. Any
deviation from acceptable limits results in audible and visual alarms. Automatic process
shutdown is initiated following process fault conditions of sufficient duration.

A printed chart of key processing parameters is included as a standard feature Model PDS-2060.
A communication port is also provided for uploading process data, on the Model, and this data can be used to generate statistical process control information.

Deposition Process :

Parylene is applied at room temperature with deposition equipment that allows control of both coating rate and ultimate thickness. Polymer deposition takes place at the molecular level as the chemical, in dimer form, is vaporized under vacuum and heat to a dimeric gas, then pyrolized to cleave the dimer to its monomeric form, and finally deposited as a transparent polymer film.

Coating thicknesses from 0.10 micron to 76 microns can be applied in a single operation.
Deposited at a typical rate of 5 microns per hour upon process equilibrium.
No catalysts or solvents are required.

A cold trap allows for liquid nitrogen or mechanical chiller cooling to prevent Parylene from depositing in the vacuum system.

Model PDS-2060VSystem Features :

Modular generation unit construction
Interchangeable chamber modules
Closed-loop monomer pressure control
Continuous process monitoring
Low-noise direct drive vacuum pumps
Message display, battery backup and data logging*
Easy-access foldout electrical and instrument panels*
Fixture rotation
Model P-100
PDS-2060 models only

Optional System Accessories:

Mechanical cold-trap chiller or automatic liquid nitrogen level controller Chamber extension and reduction kits


PDS-2060 Options "

Convenience Package consists of automated vaporizer valve, uninterruptible power supply, load door and chamber lid interlocks.

Tumble coater chamber modules

Portable Parylene Deposition Systems
Model PDS 2010    Model PDS 2010 LABCOTER® 2

The Specialty Coating Systems, Inc., LABCOTER® 2 vacuum deposition system is the first portable system designed for deposition of protective
Parylene conformal coating.

This compact coating unit is suitable for laboratory research applications, circuit board repairs, and small production coating runs on applications such
as printed circuit boards, electronic sensors, medical components, organic samples, and many other substrates.

Parylene is an inert, nonconductive polymer that is applied in a thin layer to isolate materials such as electronic circuit boards, automotive electronic
assemblies, and medical devices from moisture, contaminants, corrosives, and acids.

This unit weighs only 170 lb, and operates on 110 VAC 20 amp service.
Compact size and rolling casters make it easy to position for operation or storage. A cold trap allows for several cooling methods. Standard: manually
dispensed liquid nitrogen. Optional: Liquid nitrogen with automatic level control; or mechanical chiller.

In its computer controlled automatic mode, the system pumps down to a preset pressure and the furnace cycles up to operating temperature. When
proper temperature and pressure values are established, the vaporizer begins Parylene sublimation. Operating levels are continuously monitored and any deviation results in audio and visual alarms, with automatic halting of deposition.

Model PDS 2010 Dimensions

PDS 2010可沉積材料為 Parylene C N 型,與矽膠(silicone)、氨基鉀酸酯(urethane)、環氧化物(epoxide)相比具較佳之抗滲透性。目前聚對二甲基苯薄膜的應用除了封裝或防水塗裝外,亦也在微機電系統(MEMS)、燃料電池及有機致電發光二極體(OLED)等領域。 原理 聚對二甲基苯沉積系統原理是將一種二聚物放於真空環境下,經由蒸發、高溫熱解為單分子並重新鍵結後,將聚對二甲基苯以高分子的型態沉積於元件表面。 整個沉積過程,第一階段,將雙對二甲基苯粉末放入蒸發管並啟動機械式真空泵浦使整個沉積系統保持於低真空狀態。並開始加熱到 150°C 以上,促使雙對二甲基苯蒸發為氣態並進入熱解管中。第二階段,熱解管的溫度達 650°C 以上,氣態雙對二甲基苯進入時會被高溫熱解為單分子型態的對二甲基苯。第三階段,高溫的氣態對二甲基苯被噴發於沉積腔體中。因未對腔體加熱,所以腔體溫度在大約 25°C 左右,這使得對二甲基苯開始重新鍵結成為高分子型態的聚對二甲基苯並附著於基材表面上。

LABCOTER® Specifications

Dimensions: 19.4 in wide x 48 in high x 24 in deep
Weight: 170 lb (77.18 kg)
Chamber Size: 12 in x 12 in (30.5 x 30.5 cm)
Optional reduced capacity 3 inch high chamber with view port is available
Power: 110 VAC, single phase, 60 Hz, 20 amp service
Dimer Capacity: 125gm
Vacuum Pump: 7.4 cfm, two stage, direct drive
Controls: Semiautomatic, microprocessor temperature and pressure controls,
fault alarm monitoring

Mechanical Chiller


Mechanical Chiller (optional)
Dimensions: 10 in wide x 18.4 in high X 20 in deep
Power: 110 VAC, single phase, 60 Hz, 12 amp service

UV–visible and infrared characterization of poly(p-xylylene) films for waveguide applications and OLED encapsulation
Growth of nanostructured thin films of poly( p-xylylene) derivatives by vapor deposition

If you don't find what you're looking for, Contact Us. We may have a suitable product that's not listed, or we may be able to develop a material to fit your specific needs. Tel : (02)2217-3442 / Fax : (02)2704-4070



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