MICRO CHEM manufactures all of their products in their
newly re-fitted 25,000 square foot facility in
Newton, Massachusetts.
All the products are made in environmentally controlled
areas and packaged in Class 100 Cleanroom environments.
MICRO CHEM resist products are available in 500ml, 1
Liter, 4 Liter Amber glass bottles, in addition we can package into 10 and
20 Liter Nowpaks. The ancillary products are available in 4 Liter
Polyethylene bottles, Nowpaks and 55 Gallon drums.
PMGI Resists:
PMGI Resist Data Sheet (pdf)
Slow Resin
Medium Resin
Fast Resin
Wide range of Solids Contents
Several solvent choices
Dyed versions available
PMGI and LOR Resists:
PMGI Resist Data Sheet (pdf)
LOR A range for MIF Developers
LOR B range for MIB Developers
SU-8 & SU-8 2000 Resists:
SU-8 Photoresists Formulations (pdfs):
>
2-25
>
50-100
>
2000.5
- 2015
>
2025 - 2075
>
2100 - 2150
>
3000
Data
Table
Wide range of Solids Contents
The SU-8 product
line consists of chemically amplified; epoxy based negative resists with
high functionality, high optical transparency and are sensitive to near
UV radiation. Cured films or topography are highly resistant to solvents,
acids and bases and have excellent thermal stability, making it well
suited for permanent use applications.
Material
Attributes
>10:1 aspect ratio imaging with vertical
sidewalls.
<1um to >200 um in a single spin coat.
High chemical and plasma resistance.
Faster Drying Films.
5:1 aspect ratio imaging with vertical
sidewalls.
Up to 100 um in a single spin coat.
High chemical and plasma resistance.
Enhanced
adhesion.
![](su8.files/image003.jpg)
Ultra Thick high aspect ratio Encapsultion/Passivation Microfluidics
PMMA & Copolymer Resists:
PMMA Resist Data Sheet
495K Molecular weight
950K Molecular weight
200K Molecular weight
100K Molecular weight
50K Molecular weight
2.2 Million Molecular weight
Safer solvent choice
Wide range of Solids Contents
Ancillaries
OmniCoat™
Thinners for specific products listed
above: SU-8 2000 thinner to dilute SU-8
2000 resists
T
thinner
to dilute PMGI SF resists
G
thinner
to dilute PMGI and LOR SFG resists
A
thinner
to dilute PMMA A resists
C
thinner
to dilute PMMA C resists
EL
thinner
to dilute copolymer resists
Edge Bead Remover:
edge
bead removal, equipment cleandown
Developers for specific products listed
above: PMGI 101 developer to selectively develop
PMGI resists
SU-8
developer
to develop SU-8 & SU-8 2000 resists
MIBK:IPA 1:1 (pdf)
to
develop PMMA
& copolymer resists
MIBK:IPA 1:2 (pdf)
to
develop PMMA
& copolymer resists
MIBK:IPA 1:3 (pdf)
to
rinse PMMA
& copolymer resists
Removers/Strippers:
to
strip SU-8, PMGI, LOR & PMMA resists
光學投影顯示系統集成了三色混合波導和光柵光閥裝置![](icoLeaf.gif)
If you don't find what you're looking for,
Contact Us.
We may have a suitable product that's not listed, or we may be
able to develop a material to fit your specific needs.
Tel : (02)2217-3442 / Fax : (02)2704-4070
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