MICRO CHEM manufactures all of their products in their newly re-fitted 25,000 square foot facility in Newton, Massachusetts.

All the products are made in environmentally controlled areas and packaged in Class 100 Cleanroom environments.

MICRO CHEM resist products are available in 500ml, 1 Liter, 4 Liter Amber glass bottles, in addition we can package into 10 and 20 Liter Nowpaks. The ancillary products are available in 4 Liter Polyethylene bottles, Nowpaks and 55 Gallon drums.

PMGI Resists: PMGI Resist Data Sheet (pdf)

        Slow Resin
  Medium Resin
  Fast Resin
  Wide range of Solids Contents
  Several solvent choices
  Dyed versions available

PMGI and LOR Resists: PMGI Resist Data Sheet (pdf)

        LOR A range for MIF Developers
  LOR B range for MIB Developers

SU-8 & SU-8 2000 Resists: SU-8 Photoresists Formulations (pdfs): > 2-25  > 50-100  > 2000.5 - 2015  > 2025 - 2075
> 2100 - 2150  > 3000  Data Table

       Wide range of Solids Contents

The SU-8 product line consists of chemically amplified; epoxy based negative resists with high functionality, high optical transparency and are sensitive to near UV radiation. Cured films or topography are highly resistant to solvents, acids and bases and have excellent thermal stability, making it well suited for permanent use applications.

Material Attributes

                  >10:1 aspect ratio imaging with vertical sidewalls.
                    <1um to >200 um in a single spin coat.
                     High chemical and plasma resistance.
                     Faster Drying Films.

                  5:1 aspect ratio imaging with vertical sidewalls.
                    Up to 100 um in a single spin coat.
                    High chemical and plasma resistance.
                    Enhanced adhesion.

Ultra Thick high aspect ratio               Encapsultion/Passivation                         Microfluidics

PMMA & Copolymer Resists: PMMA Resist Data Sheet

          495K Molecular weight
  950K Molecular weight
  200K Molecular weight
  100K Molecular weight
  50K Molecular weight
  2.2 Million Molecular weight
  Safer solvent choice
  Wide range of Solids Contents

Ancillaries

       OmniCoat™

     Thinners for specific products listed above: SU-8 2000 thinner     to dilute SU-8 2000 resists

                                                                      T thinner                 to dilute PMGI SF resists

                                                                      G thinner                 to dilute PMGI and LOR SFG resists

                                                                      A thinner                 to dilute PMMA A resists

                                                                      C thinner                 to dilute PMMA C resists

                                                                      EL thinner                to dilute copolymer resists

       Edge Bead Remover: edge bead removal, equipment cleandown

     Developers for specific products listed above: PMGI 101 developer    to selectively develop PMGI resists

                                                                         SU-8 developer           to develop SU-8 & SU-8 2000 resists

                                                                         MIBK:IPA 1:1 (pdf)     to develop PMMA & copolymer resists

                                                                         MIBK:IPA 1:2 (pdf)     to develop PMMA & copolymer resists

                                                                         MIBK:IPA 1:3 (pdf)     to rinse PMMA & copolymer resists

       Removers/Strippers: to strip SU-8, PMGI, LOR & PMMA resists

光學投影顯示系統集成了三色混合波導和光柵光閥裝置
　

If you don't find what you're looking for, Contact Us. We may have a suitable product that's not listed, or we may be able to develop a material to fit your specific needs. Tel : (02)2217-3442 / Fax : (02)2704-4070