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Fabrication techniques of slab and channel waveguides.
Materials and fabrication process.
Selection and fabrication process.
Spin-dip-coating deposition
Chemical vapor deposition
Radio-frequency deposition
Thermal vapor deposition
Sputtering
Ion-exchanged process
Epitaxial growth process
Ion implanation
Polymerization
Thermal diffusion
Structures and fabrication of 3-D waveguides.
Photolithography techniques in optical
waveguide : 1
Buried type 2
Ridge type 3
Dielectric-film loaded type 4
Metal-film type 5
Introduction to materials and fabrication techniques 6
Waveguide
patterning process
LiNbO3/LiTaO3 waveguides
Thermal Ti-in-diffusion : 1
crystal preparation and metal-film depsition 2
Ti-diffused waveguides and deposition of buffer coatings.
Photon exchange waveguide.
Epitaxial grown
Liquid phase
GaAs waveguides 1
Epitaxial grown 2
Reactive ion etching
SiO2/Si waveguides 1
SiO2 characteristic 2
SiO2 buffer layer thickness 3
Fabrication process and type of etchings.-
Polymer thin film
waveguides
Fabrication methods and charateristics 1 Injection molding 2 Wet chemical 3 Projection
printing 4
Ultraviolet laser 5
Photobleach 6
Reactive ion etching
Organic and polymer
materials
Polymer
films in semiconductor process
Types of etching effect
Degree of planarization
Multichip module interlayer dielectric applications : 1 Wet etching process 2 Dry etching
process.
Nonlinear
optical polymer
materials
Electro-optic coefficient in polyimide
Electric poling field process
Waveguide
Design in Integrated Optical
Circuits
Materials and Fabrication Techniques of
Optical
Waveguides
Glass-Waveguides on Integrated
Optical
Substrates (Part I)
Glass-Waveguides on Integrated
Optical
Substrates (Part II)
Fiber-to-Optical
waveguide
coupling techniques
Characteristics and Measurement of integrated channel waveguides.
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Tel : (02)2217-3442 / Fax : (02)2704-4070
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