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ICP Etched Waveguides




Arrayed Waveguides (Microscope)

Standard Optical Waveguides Resins
ZPU12 and 13-RI series are photoactive UV curable fluorinated resins based on acrylate. They
are useful for optical waveguide devices and optical thin film applications. These coating resins
have low optical loss for optical communication wavelengths, small birefringence, and excellent
environmental stability. To be used for various waveguide structures, precise and continuous
control of refractive index is available by blending of polymer solutions with standard refractive
index. To achieve the best film quality, a nitrogen environment is recommended during the UV
exposure.

Availability and Storage
ZPU12 and 13-RI resins are available in 100 and 250 g quantities. The ZPU12-RI series should be
stored in a dark and cool place under 25
°C in the bottle with a tight cap. Moisture should be
avoided because it may affect the product performance.

Features
Low optical loss
Environmental stability
Controllable refractive index
Low Birefringence
Good Adhesion

Applications
Optical power splitters
Variable optical attenuators
Optical Switches
WDM related devices
Optical interconnections
Multi-mode devices
Waveguide claddings
Thin film applications

Performance Specifications
 

 

Standard Item

ZPU12-RI

ZPU13-RI

450

470

430

450

Liquid

Viscosity (cps @ 25 °C)

200 ~ 300

50 ~ 150

Filtration

0.1 ~ 0.2 µm absolute PTFE filter

UV-exposure

> 2500 mJ/cm2 (160 °C/30 min, post baking)

     
     

Film

Propagation Loss
(measured from slab waveguide)

0.35 dB/cm @1.55 µm wavelength

0.06dB/cm @1.3 µm wavelength

Refractive Index @ 1.55 µm

1.4500

1.4700

1.4300

1.4500

Birefringence (nTE-nTM)

0.001 ± 0.0003

0.0007 ± 0.0003

Refractive index uniformity

< 0.00012

Thermo-optic coefficient

-1.5 ~ -2.2 x 10-4/ °C

CTE (ppm/, by TMA)

200 ~ 300

300 ~ 400

Glass Transition Temp. (Tg)

Not detectable

Degradation Temp. (1 %)

300 ± 20 °C

Surface roughness(AFM)

0.35 nm at 8µm thickness

Film thickness

< 25 per coating (multi-coating available)

Reliability

See the back page

* Refractive index is tunable from 1.415 to 1.485 by request.

Reliability of Optical Waveguide Resins (ZPU12-RI and ZP13-RI)
During the test, all of the films were not peeled off from the Si wafer substrate and their refractive
index  were not changed.
The test films were made by spin coating and curing on the Si wafer after treatment of the
adhesion promoter.

 

If you need any special spec, we can customize




If you don't find what you're looking for, Contact Us. We may have a suitable product that's not listed, or we may be able to develop a material to fit your specific needs. Tel : (02)2217-3442 / Fax : (02)2704-4070
 

 

 

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