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Xenon Difluoride (XeF2)
  Chlorine trifluoride (ClF3)
  Bromine Trifluoride (BrF3)
   
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蝕刻氣體Xenon difluoride (XeF2)AlSiO2Si3N4AuTiNiacrylic光阻有極高的選擇性,故而適於CMOS元件的後處 .

Interhalogen (XeF2
ClF2BrF2)
具有氣體蝕刻的優點但不會產生粗糙的表面。蝕刻速率AlCuAuNi=1000:1SiO2:Si=3000:1Si3N4=400 – 800:1AZ4400AZ1518=1000:1

Xenon difluoride is a very powerful fluorinating agent, but it is one of the most stable xenon compounds. Like most covalent inorganic fluorides it is moisture sensitive. It decomposes on contact with light or water vapour. Xenon difluoride is a dense, white crystalline solid. It has a nauseating odour but low vapor pressure. It has a strong characteristic IR doublet at 550 cm−1 and 556 cm−1.

Material Specification Sheet Xenon Difluoride XeF2

SPECIFICATION

Material

Specification  (wt ppm)

Typical analysis (wt ppm)

XeF2

99.999 %

 99.9994 %

Al

 

0.63

Ca

 

0.30

Co

 

0.16

Cr

 

0.39

Cu

 

0.09

Fe

 

1.73

K

 

0.16

Li

 

0.02

Mg

 

0.32

Mn

 

0.04

Mo

 

0.21

Na

 

0.15

Ni

 

1.55

Total metals

< 10

5.75

Product is free of any XeF4 contamination
Supplied in PTFE bottles, gas cylinders or customer supplied containers

Physical properties

Physical form  Colourless/white crystals
Molecular weight
 169.29
Vapour pressure
 approximately 4 Torr (0.5 kPa) at 25° C
Melting point
 129° C
Boiling point
 114° C
Stable molecule up to 500° C
Density 4.32 g
/ml
Packing density 2 g
/ml
Soluble in water (25 g
/L at 0° C) and hydrolyses to form HF
Odor
 Ozone like




Synthesis, Properties and Chemistry of Xenon(II) Fluoride
Rapid Sacrificial Germanium Etching Using Xenon Difluoride
 


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