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Xenon Difluoride (XeF2)
  Chlorine trifluoride (ClF3)
  Bromine Trifluoride (BrF3)
   
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蝕刻氣體Xenon difluoride (XeF2)AlSiO2Si3N4AuTiNiacrylic光阻有極高的選擇性,故而適於CMOS元件的後處 .

Interhalogen (XeF2
ClF2BrF2)
具有氣體蝕刻的優點但不會產生粗糙的表面。蝕刻速率AlCuAuNi=1000:1SiO2:Si=3000:1Si3N4=400 – 800:1AZ4400AZ1518=1000:1

Xenon difluoride is a very powerful fluorinating agent, but it is one of the most stable xenon compounds. Like most covalent inorganic fluorides it is moisture sensitive. It decomposes on contact with light or water vapour. Xenon difluoride is a dense, white crystalline solid. It has a nauseating odour but low vapor pressure. It has a strong characteristic IR doublet at 550 cm−1 and 556 cm−1.

Material Specification Sheet Xenon Difluoride XeF2

SPECIFICATION

Material

Specification  (wt ppm)

Typical analysis (wt ppm)

XeF2

99.999 %

 99.9994 %

Al

 

0.63

Ca

 

0.30

Co

 

0.16

Cr

 

0.39

Cu

 

0.09

Fe

 

1.73

K

 

0.16

Li

 

0.02

Mg

 

0.32

Mn

 

0.04

Mo

 

0.21

Na

 

0.15

Ni

 

1.55

Total metals

< 10

5.75

Product is free of any XeF4 contamination
Supplied in PTFE bottles, gas cylinders or customer supplied containers

Physical properties

Physical form  Colourless/white crystals
Molecular weight
 169.29
Vapour pressure
 approximately 4 Torr (0.5 kPa) at 25° C
Melting point
 129° C
Boiling point
 114° C
Stable molecule up to 500° C
Density 4.32 g
/ml
Packing density 2 g
/ml
Soluble in water (25 g
/L at 0° C) and hydrolyses to form HF
Odor
 Ozone like



Synthesis, Properties and Chemistry of Xenon(II) Fluoride
Rapid Sacrificial Germanium Etching Using Xenon Difluoride
Influence of Reaction with XeF2 on Surface Adhesion of Al and Al2O3 Surfaces
Determination of etching parameters for pulsed XeF2 etching of silicon using chamber pressure data
Silicon Etching in XeF2 Environment
XeF2 Etching of Epitaxial Nb2N for Lift-off or Micromachining of III-N Materials and Devices
Manipulating Etch Selectivities in XeF₂ Vapour Etching
Application of Dual-Doped TMAH Silicon Etchant in the Fabrication of a Micromachined Aluminum Flexing Beam Actuator
Etch Overview for Microsystems
 


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