NR5-8000 鍍金和deep RIE 製程, through-holes in silicon, GaAs and InP, NR5-8000 是deep RIE 最好的Mask.

NR5-8000 and NR9-8000P可製成超過 4:1. AR ratio的圖型
　

Process Characterization of One Hundred Micron Thick Photoresist Films
Intergration of resonant N/MEMS for energy harvesting from ambient vibrations
Low-Cost and Fast-Response Resistive Humidity SensorComprising Biopolymer-Derived Carbon
Development of the thin film structure for the inkjet printhead
A Thermal Inkjet Printhead with a Monolithically Fabricated Nozzle Plate and Self-Aligned Ink Feed Hole
High-Resolution Long-Array Thermal Ink Jet Printhead Fabricated by Anisotropic Wet Etching and Deep Si RIE
LIGA and Other Replication Techniques
Ultra thin ultrafine-pitch chip-package interconnections for embedded chip last approach
Thin Film and CarbonMicroelectrodes
A metallic buried interconnect process for through-wafer interconnection
Ultra-high-resolution monolithic thermal bubble inkjet print head
Etch Rates for Micromachining Processing
Manufacture of an Integrated Three-Dimensional Structure Nozzle Plate Using Microinjection Molding for a 1200-dpi Inkjet Printhead
Effective slip and friction reduction in nanograted superhydrophobic microchannels
Development of fabrication techniques for 3-D structures
A micromachined ultrasonic droplet generator: design, fabrication, visualization, and modeling
鎳質噴嘴片應用於微型霧化器之製作技術與研究
Thermal inkjet printhead with a monolithically fabricated nozzle plate and self-aligned ink feed hole
Characterization of Ultra-thick Photoresists for MEMS Applications Using a 1X Stepper
利用微影制程製作噴墨式打印頭的噴孔片的方法
Fabrication of integrated nozzle plates for inkjet print head using microinjection process

　

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