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什麼是Parylene Coating |
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Parylene真空微米塗裝（高分子封裝）是國外開發應用的一種新型塗裝技術，這項獨特的「真空氣相沉積」製程，是在常溫的真空室中，讓活性分子在被塗裝的物件表面生成完全披覆的聚合物薄膜，可塗裝到任何形狀的表面，且不產生死角，包括尖銳的稜角、隙縫內部與極細微的針孔中，膜厚可一致性的被覆在產品的任何部位，薄膜厚度由0.001mm-0.05mm，是世界最薄的塗裝之一。
另外，parylene真空微米塗裝應用的領域廣泛，包括：電器電子類、資訊通訊類、金屬類、橡膠塑膠或矽膠類與醫療用品類等產品。真空微米塗裝具高絕緣性的無針孔皮膜，達到膜厚一致性的耐電壓薄膜，更具備防水、防潮、防塵、防銹與耐酸鹼性，對醫療用品的抗菌、抗氧化及耐溶劑性有很好的保護效果。此外，parylene真空微米塗裝材料已通過美國軍規MIL-I-46058C驗証合格及無毒試驗證明與設備排放無汙染等標準規定，對環境保護與產業競爭力和產品品質提升有很大助益。
Low-K材料的沉積方法大概可以分為下面兩種，茲將其優缺點列於下：
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旋轉塗佈(Spin
On) |
化學薄膜沉積(CVD--Chemical
Vapor Deposition) |
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優點 |
優點 |
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設備簡單便宜 |
浪費的材料較少 |
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操作容易 |
不需使用具毒性的溶劑 |
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可達局部平坦化* |
薄膜純度較易控制 |
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缺點 |
穩定性較優良 |
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浪費的材料較多 |
不易產生破裂 |
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需使用具毒性的溶劑 |
缺點 |
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薄膜純度控制不易 |
設備較複雜昂貴 |
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穩定性較不良 |
操作較難 |
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較易產生破裂 |
不易達局部平坦化 |
由上表之比較可以清楚看出，旋轉塗佈(Spin
On)的優點恰好是化學薄膜沉積(CVD)的缺點，缺點則恰是其優點。多數的有機低介電常數材料常以旋轉塗佈的方式製程，無機的則恰相反，不過也有例外，如HSQ為有機卻是用spin
on，而parylene為無機卻是用CVD。
spin on
*局部平坦化：這是跟其製程方式有關，旋轉塗佈需先將低介電常數材料溶解於溶劑內，然後以塗佈的方式塗於晶體表面後，可以隨溶劑在表面流動來填入先前製程之起伏表面，因此這些低介電常數材料可以較容易填入凹槽內以達成局部平坦化的效果。
目前於低介電常數材料研磨液的研究多半集中在高分子介電膜，
如Parylene-N(PA)、Fluorinated
Polyimide(FP)及Benzocyclobutene(BCB
... |
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Parylene Types |
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Parylene N：是由poly-P-xylylene方式鍵結聚合，其特性為線性，且為高結晶之材料，Parylene
N之分子是非常有彈性的，並且可以在聚合沉積作用之前多次的bounce，另外在沉積過程中所需壓力也比其他parylene之形式高，沉積速率亦相較其他形式慢的多，大概是每小時沉積0.00003
"
Parylene C：其分子結構相似Parylene
N，不同在於其芳香基中之一氫分子the
aromatic hydrogens被氯chlorine所取代。在沉積過程中所需的壓力約為Parylene
N之一半，速率大概是每小時沉積0.0002
"
Parylene D：
其分子結構相似Parylene
N，不同在於其芳香基中之二個氫原子the
aromatic hydrogens被二個氯原子chlorine所取代，其在chamber中沉積與聚合速度非常快，但鍵結壓力卻十分慢，
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種類 特性 |
Parylene N |
Parylenen C |
Parylene D |
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化學結構 |
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多一個氯原子 |
多二個氯原子 |
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溫度穩定度 |
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可承受較高溫度 |
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透濕性 |
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較低的透溼性 |
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沉積速率 |
較慢 |
最快 |
居中 |
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介電常數 |
最強 |
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For Environment
consideration, Does any
Clorine or Tolune come
out during exaust |
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No, even if there is the quantity is very small in ppm levels. |
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Does the exaust is
vaccumm process? When to
exaust |
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Yes, whenever
the coating machine is turn on and the vacuum pump
running.This is because it will need to maintain the system
under vacuum condition. |
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Do you have data of
parylene thickness
against Votage
resistance |
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Yes it is indicated in our SCS catalogue "Parylene
specifications and properties" under Electrical Properties
page 4. See Figure 3 on Break Down Voltage of Parylene C and N
vs Polymer Film Thickness. |
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Please supply Maitenance
cost |
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This is subjective. Depending on the frequency of usage on the
machine. I do not know how often ACME is going to run the
machines or what is their production schedule / volume, single
shift or 3 shifts, labour rate per hour? Need these
information to work on. |
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What is standard
electricity |
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14KW - 220V, 3 phase, 50/60 hz, 70 amps |
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How to clean |
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To place the quartz liner in an oven and burnout the Parylene.
All they need to do is removed the ashes of the Parylene with
a brush.place the quartz liner in an oven and burnout the
Parylene. All they need to do is removed the ashes of the
Parylene with a brush. |
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Is vacuum dryer
necessary for IPA
drying |
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Yes it is recommended. |
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Does any Clorine or
Tolune come out during
exaust |
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No,
even if there is the quantity is very small in ppm levels. |
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Does the exaust is
vaccumm process? When to
exaust |
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Yes,
whenever the coating machine is turn on and the vacuum pump
running.This is because it will need to maintain the system
under vacuum condition. |
