材料受單位電壓下，單位體積儲存靜電能量為介電常數，介電常數愈小，電絕緣性愈佳。介電常數易受頻率、溫度、溼度影響，變化比其初始值重要， 產品的密閉性，若有空隙，通路因濕氣易腐蝕，受到電壓，空隙將行程電場集中現象，引起內部放電，導致絕緣破壞。製程中，低介電常數材料 提供 機械強度支撐多層連線的架構、高楊氏係數、高擊穿電壓、低漏電、高熱穩定性、良好的粘合強度、低吸水性、低薄膜應力、高平坦化、低熱漲係數以及與化學機械拋光製程相容性。滿足上述特性並不容易。如，薄膜的介電常數與熱傳導係數往往就呈反比關係。

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