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Specifications
Crystal Growth Method
：Vertical-Gradient-Freeze(VGF)
Dopant：Undoped
Resistivity：>1x10E7W
cm
Mobility：>5,000cm2/V-sec
Wafer shape：Round
|
ETCH PIT DENSITY(class)+ |
E |
F |
G |
|
UNIT(cm-2) |
<1000 |
<3000 |
<5000 |
+100%area guaranteed
Surface Orientation：
(100)and (111) +x。off
toward other directions available on request
|
Size |
2” |
3” |
Remarks |
|
Thickness(center) |
350(mm) |
625(mm) |
Others upon request * |
|
TTV |
5mm |
7mm |
** |
|
Bow |
5mm |
7mm |
** |
|
OF/IF(mm) |
16±1/7±1 |
22±1/12±1 |
** |
|
Polish |
E/E,P/LE,P/P |
E/E,P/LE,P/P |
** |
* thickness of 100 mm is available
** definition is given in Appendix
Note:4”wafer is available on
request semi-insulating,Cr-doped wafer is available on request
Conductivity：P
Dopant：Zn
Carrier Concentration range：5
x10E17 - 5 x10E19 cm-3
Resistivity：0.3-15.0
x 10E-2W cm
Mobility：40
- 100cm2/V-sec
Wafer shape：Round
|
ETCH PIT DENSITY(class)+ |
E |
F |
|
UNIT(cm-2) |
<1000 |
<3000 |
+100%area guaranteed
Surface Orientation：
(100)and (111) +x。off
toward other directions available on request
|
Size |
2” |
3” |
Remarks |
|
Thickness(center) |
350(mm) |
625(mm) |
Others upon request * |
|
TTV |
5mm |
7mm |
** |
|
Bow |
5mm |
7mm |
** |
|
OF/IF(mm) |
16±1/7±1 |
22±1/12±1 |
** |
|
Polish |
E/E,P/LE,P/P |
E/E,P/LE,P/P |
** |
* thickness of 100 mm is available
** definition is given in Appendix
Note: 4” wafer is available on
request
Conductivity：N
Dopant：Si
Carrier Concentration range：5
x10E16 - 4 x10E18 cm-3
Resistivity：1.0
- 40.0 x 10E-3W cm
Mobility：1,200
- 3,300cm2/V-sec
Wafer shape：Round
|
ETCH PIT DENSITY(class)+ |
A |
B |
C |
D |
|
UNIT(cm-2) |
<20 |
<100 |
<300 |
<500 |
+100%area guaranteed
Surface Orientation：
(100)and (111) +x。off
toward other directions available on request
|
Size |
2” |
3” |
Remarks |
|
Thickness(center) |
350(mm) |
625(mm) |
Others upon request * |
|
TTV |
5mm |
7mm |
** |
|
Bow |
5mm |
7mm |
** |
|
OF/IF(mm) |
16±1/7±1 |
22±1/12±1 |
** |
|
Polish |
E/E,P/LE,P/P |
E/E,P/LE,P/P |
** |
* thickness of 100 mm is available
** definition is given in Appendix
Note: 4” wafer is available on
request
If you don't find what you're looking for,
Contact Us.
We may have a suitable product that's not listed, or we may be
able to develop a material to fit your specific needs.
Tel : (02)2217-3442 / Fax : (02)2704-4070
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