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Specifications


Crystal Growth Method
Vertical-Gradient-Freeze(VGF)
Dopant
Undoped
Resistivity
>1x10E7W cm
Mobility
>5,000cm2/V-sec
Wafer shape
Round

ETCH PIT DENSITY(class)+

E

F

G

UNIT(cm-2)

<1000

<3000

<5000

+100%area guaranteed

Surface Orientation
(100)and (111) +x
off toward other directions available on request

Size

2”

3”

Remarks

Thickness(center)

350(mm)

625(mm)

Others upon request *

TTV

5mm

7mm

**

Bow

5mm

7mm

**

OF/IF(mm)

16±1/7±1

22±1/12±1

**

Polish

E/E,P/LE,P/P

E/E,P/LE,P/P

**

* thickness of 100 mm is available
** definition is given in Appendix

Note:4”wafer is available on request semi-insulating,Cr-doped wafer is available on request

 

ConductivityP
Dopant
Zn
Carrier Concentration range
5 x10E17 - 5 x10E19 cm-3
Resistivity
0.3-15.0 x 10E-2W cm
Mobility
40 - 100cm2/V-sec
Wafer shape
Round

ETCH PIT DENSITY(class)+

E

F

UNIT(cm-2)

<1000

<3000

+100%area guaranteed

Surface Orientation
(100)and (111) +x
off toward other directions available on request

Size

2”

3”

Remarks

Thickness(center)

350(mm)

625(mm)

Others upon request *

TTV

5mm

7mm

**

Bow

5mm

7mm

**

OF/IF(mm)

16±1/7±1

22±1/12±1

**

Polish

E/E,P/LE,P/P

E/E,P/LE,P/P

**

* thickness of 100 mm is available
** definition is given in Appendix

Note: 4” wafer is available on request

 

ConductivityN
Dopant
Si
Carrier Concentration range
5 x10E16 - 4 x10E18 cm-3
Resistivity
1.0 - 40.0 x 10E-3W cm
Mobility
1,200 - 3,300cm2/V-sec
Wafer shape
Round

ETCH PIT DENSITY(class)+

A

B

C

D

UNIT(cm-2)

<20

<100

<300

<500

+100%area guaranteed

Surface Orientation
(100)and (111) +x
off toward other directions available on request

Size

2”

3”

Remarks

Thickness(center)

350(mm)

625(mm)

Others upon request *

TTV

5mm

7mm

**

Bow

5mm

7mm

**

OF/IF(mm)

16±1/7±1

22±1/12±1

**

Polish

E/E,P/LE,P/P

E/E,P/LE,P/P

**

* thickness of 100 mm is available
** definition is given in Appendix

Note: 4” wafer is available on request




If you don't find what you're looking for, Contact Us. We may have a suitable product that's not listed, or we may be able to develop a material to fit your specific needs. Tel : (02)2217-3442 / Fax : (02)2704-4070
 

 

 

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