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噴霧式光阻塗佈機
  旋轉式光阻塗佈機
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   

   

   
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旋涂是用于均匀施加过程薄膜到平坦基底  总之,少量的溶液(涂布材料)被放置在平坦的基板的中心。 然后将该底材旋轉以高速,以分散的溶液通过离心力  
后大部分的溶液被剥离出来的基片的边缘,将基板保持旋轉,直到膜的所需厚度。 所施加的溶液通常是挥发性的 ,同时蒸发 。因此,较高的角速度旋轉的,膜越薄。 该薄膜的厚度还依赖于溶液和溶剂的浓度。 


旋涂的阶段 
虽然不同的工程师计数不同的事情,有四个不同的阶段,以旋涂法。 


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涂布液的沉积到晶片或基底 
可以通过使用一个喷嘴和浇注涂层溶液或者通过喷洒到表面上进行。 大幅过量的涂布液通常适用相比所需的量。 
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加速基板的至其最终,需要的话,旋转速度 
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基底以琠w速率的旋轉流体的粘滞力主导流体变稀 
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基底以琠w速率的旋轉溶剂挥发主导涂层变薄 

 

 

P-6204 spincoater 
8",up to 6" diameter non-programable, 100~8,000 rpm, speed adjustable,

automatic time
ramp time;  1~30

110ACV, 220ACV



P6204 Spin Coater  The P6204 (8-in. bowl) Non-programmable Spin Coater was designed for the value conscience in mind. Same high quality as our P6708/6712 series without many of the programmable and regulating options. Speed is controlled by adjustable settings.      


Speed: 100-8000 RPM, Adjustable
Automatic Timer:0-999 seconds
Acceleration/Deceleration:Ramp times from 1.0 to 30 seconds
Power:115 VAC, 60Hz, 1 amp or 220 VAC, 50Hz, .5 amp



 

 

 

 

 

P-6708 spincoater
8"  up to 6" diameter

programable, 100~8,000 rpm, speed adjustable,

automatic time

ramp time;  1~30

110ACV, 220ACV

multiple ramp up, hold, ramp down


 


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